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Productinfo

Vacuum Chuck table

Item No: SCL03

Product Description

    

Ceramic chuck tables and mainly used to support and chuck the semiconductor wafer when 

grinding and dicing .it is applied in the processes of thinning ,dicing ,clearance, transportation and so on .

these products which have high cost performance produced by our institute can match dicing machine: Disco, ADT and Accretech.    

 

Wafer size :2, 3, 4, 5, 6, 8, 12 

Suitable devices: wafer grinder, dicing machine and cleaning ,machine ,etc

chuck type: fine-pore ceramic 

 

Characteristics

high flatness and parallelism

compact and uniform microstructure with high strength 

good permeability and uniform adsorption affinity 

dressing easily